ISO 14644-2:2015給出了
潔凈室壓差監(jiān)測的要求，如下：
關(guān)于壓差報警限的制定，建議設(shè)定為日常監(jiān)測上限-（2~3Pa）或壓差下限+（2~3Pa）
“After observing and recording the normal operating ranges, it is recommended that a pressure setting for the warning pressure measurement device be selected a few Pascal below the lowest pressure observation for a positive-pressure（壓差上限） configuration, or a few Pascal above in a negative-pressure?（壓差下限）configuration (guidance value 2 Pa to 3 Pa).
觀察和記錄正常操作范圍后，建議對報警壓力裝置設(shè)定一個壓力報警范圍值，以高低之間的范圍來進行控制（建議數(shù)值的設(shè)定范圍為2-3Pa）”
關(guān)于壓差報警，允許對壓差報警設(shè)定延時，以滿足日常操作需要（如進出開門），但需要合理確定該項活動所需要的時間，并以此確定延時。
“It is often necessary to delay the alert or action alarm to allow for normal activity in the cleanroom, such as the opening of doors to permit entry and exit of personnel. Careful observation of the duration of typical or expected normal deviation is necessary to determine appropriate time delay.Deviations that extend beyond the normal durations should activate warnings.
正常設(shè)定?生警戒或者行動報警過程中會存在有延時的設(shè)定，以此保證潔凈間的常輿活動，比如：開門允許人員的?出，在該過程中需仔細觀察所執(zhí)行的正?；蝾A(yù)期的時間，以此確定報警的延時。若超過常輿時間造成偏離系統(tǒng)將會激?報警?！?/div>
有關(guān)緩沖間門的要求，除非安裝氣密封（equipped with inflatable seals），否則開門后壓差存在泄漏。
Air locks are designed to help maintain pressure differentials as personnel or
materials move from one cleanroom or clean zone to another. Air locks are designed or operated so that one opposing door set is always closed. However, unless the doors are equipped with inflatable seals, the leakage through the airlock is usually greater when one of the opposing door sets is open than when they are both closed.
緩沖間是設(shè)計來幫助在人員或物料從一個潔凈區(qū)或潔凈間移動至另一個潔凈區(qū)/間時維持壓差。緩沖間的設(shè)計或操作應(yīng)保證其中一邊的門總是保持關(guān)閉。然而，除非門采用了充氣密封，否則當(dāng)一邊的門打開時，通過緩沖間產(chǎn)生泄漏通常大于兩邊門都關(guān)閉。
關(guān)于緩沖間壓差的監(jiān)測要求：應(yīng)監(jiān)測開關(guān)門后壓差恢復(fù)的情況，確保壓差恢復(fù)后才能打開另一道門。
It is necessary to test and document these normal variations to properly set alert and action levels for pressure alarms. Follow this procedure:
需要測試和記錄這些常規(guī)變化，以便為壓力報警設(shè)定適當(dāng)?shù)木浜托袆酉?。參照以下程序進行評估：
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close all doors and pass-through hatches, define the operational status of any equipment, and observe the steady-state pressure differentials between the selected rooms or zones noting the small, normal fluctuations that will occur due to wind and other dynamic effects;
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關(guān)閉所有的門和傳遞窗，定義所有設(shè)備的運行狀態(tài)，觀察穩(wěn)定狀態(tài)下所選擇的房間或區(qū)間的壓差，注意由于風(fēng)或其它動態(tài)影響產(chǎn)生的小的常規(guī)波動；
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for each airlock, pass-through hatch or transfer chamber, open allthe doors, one set of opposing doors at a time, and note room- or zone-pressurevariation. Close the doors and confirm that the pressure differentials return to theiroriginal values;
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每個緩沖間、傳遞窗或轉(zhuǎn)移艙，打開所有的門，一次打開一邊的門，注意房間或區(qū)間壓力波動。關(guān)門，確認壓差回到其原始值；
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leakage paths, such as those around doors, should be evaluated as part of a cleanroom design to ensure adequate allowance is made in the air balance for such leakages.
泄漏途徑，例如門周邊泄漏，應(yīng)進行評估，作為潔凈間設(shè)計的一部分，以確保為此泄漏做出了足夠的空氣平衡余量。
